JPH0315544Y2 - - Google Patents
Info
- Publication number
- JPH0315544Y2 JPH0315544Y2 JP7812084U JP7812084U JPH0315544Y2 JP H0315544 Y2 JPH0315544 Y2 JP H0315544Y2 JP 7812084 U JP7812084 U JP 7812084U JP 7812084 U JP7812084 U JP 7812084U JP H0315544 Y2 JPH0315544 Y2 JP H0315544Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- electrode
- processing chamber
- permanent magnet
- high voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 229910000640 Fe alloy Inorganic materials 0.000 claims 1
- 229910019589 Cr—Fe Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7812084U JPS60189558U (ja) | 1984-05-29 | 1984-05-29 | トリガ電極装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7812084U JPS60189558U (ja) | 1984-05-29 | 1984-05-29 | トリガ電極装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60189558U JPS60189558U (ja) | 1985-12-16 |
| JPH0315544Y2 true JPH0315544Y2 (en]) | 1991-04-04 |
Family
ID=30621810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7812084U Granted JPS60189558U (ja) | 1984-05-29 | 1984-05-29 | トリガ電極装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60189558U (en]) |
-
1984
- 1984-05-29 JP JP7812084U patent/JPS60189558U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60189558U (ja) | 1985-12-16 |
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